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 IMAGE SENSOR
NMOS linear image sensor
S5930/S5931 series
Built-in thermoelectric cooler ensures long exposure time and stable operation.
NMOS linear image sensors are self-scanning photodiode arrays designed specifically as detectors for multichannel spectroscopy. The scanning circuit is made up of N-channel MOS transistors, operates at low power consumption and is easy to handle. Each photodiode has a large active area, high UV sensitivity yet very low noise. The built-in thermoelectric cooler (air cooled) allows a long exposure time achieving a high S/N even at low light levels. The cap uses a sapphire glass window hermetically welded for high reliability.
Features
Applications
l Wide active area
Pixel pitch: 50 m (S5930 series) 25 m (S5931 series) Pixel height: 2.5 mm l High UV sensitivity with good stability l Low dark current and high saturation charge allow a long integration time and a wide dynamic range at room temperature l Excellent output linearity and sensitivity spatial uniformity l Start pulse and clock pulses are CMOS logic compatible l Built-in air-cooled thermoelectric cooler (setting temperature: 0 C)
l Multichannel spectrophotometry l Image readout system
s Selection guide
Type No.
Active area size [mm (H) x mm (V)] S5930-256S 256 12.8 x 2.5 50 x 2500 S5930-512S 512 25.6 x 2.5 S5931-512S 512 12.8 x 2.5 25 x 2500 S5931-1024S 1024 25.6 x 2.5 In addition to S5930/S5931 series, Hamamatsu provides S8382/S8383 series thermoelectrically cooled NMOS linear image sensors that offer higher sensitivity in the near IR range. Major characteristics of S8382/S8383 series are almost identical with S5930/S5931 series except that the peak sensitivity wavelength is 750 nm (see Figure 5) and the saturation charge is 90 m lx s. Number of pixels
Pixel size [m (H) x m (V)]
NMOS linear image sensor
Figure 1 Equivalent circuit
START CLOCK CLOCK st 1 2 DIGITAL SHIFT REGISTER (MOS SHIFT REGISTER) END OF SCAN
S5930/S5931 series
Figure 2 Active area structure
ACTIVE PHOTODIODE
ACTIVE VIDEO
Vss SATURATION CONTROL GATE SATURATION CONTROL DRAIN DUMMY DIODE
1.0 m 400 m
b a
DUMMY VIDEO
1.0 m
OXIDATION SILICON
N TYPE SILICON
KMPDC0020EA
P TYPE SILICON
S5930 SERIES: a=50 m, b=45 m S5931 SERIES: a=25 m, b=20 m
KMPDA0132EA
s Absolute maximum ratings
Parameter Symbol Value Unit 15 V Input pulse (1, 2, st) voltage V Operating temperature * 1 Topr -40 to +65 C Storage temperature Tstg -40 to +85 C *1: No condensation. Ambient temperature should be less than the element cooling temperature +35 C. (Example: Ambient temperature should be less than 35 C in order to keep the element temperature at 0 C.)
s Specifications (Ta=25 C, unless otherwise noted)
Parameter Symbol Min. -
Pixel pitch Pixel height Spectral response range 200 to 1000 (10 % of peak) Peak sensitivity wavelength 600 p 25 C 0.2 0.6 ID Photodiode dark current * 0 C 0.006 0.018 2 Photodiode capacitance * Cph 20 Saturation exposure *2, *3 Esat 180 Saturation output charge *2 Qsat 50 Photo response non-uniformity *4 PRNU 3 *2: Vb=2.0 V, V=5.0 V *3: 2856 K, tungsten lamp *4: 50 % of saturation, excluding the start pixel and last pixel
S5930 series Typ. Max. 50 2.5 -
Min. -
S5931 series Typ. Max. 25 2.5 200 to 1000 600 0.1 0.003 10 180 25 0.3 0.009 3
2.5 mm
Unit m mm nm nm pA pF mlx * s pC %
NMOS linear image sensor
s Electrical characteristics (Ta=25 C)
Parameter Clock pulse (1, 2) voltage Symbol Condition High V1, V2 (H) Low V1, V2 (L) High Vs (H) Start pulse (st) voltage Low Vs (L) Video bias voltage *5 Vb Saturation control gate voltage Vscg Saturation control drain voltage Vscd tr1, tr2 Clock pulse (1, 2) rise/fall time *6 tf1, tf2 Clock pulse (1, 2) pulse width tpw1, tpw2 Start pulse (st) rise/fall time trs, tfs Start pulse (st) pulse width tpws Start pulse (st) and clock pulse tov (2) overlap 6 Clock pulse space * X1, X2 Data rate *7 f Video delay time Clock pulse (1, 2) line capacitance Saturation control gate (Vscg) line capacitance Video line capacitance tvd C Cscg CV Min. 4.5 0 4.5 0 1.5 200 200 200
S5930/S5931 series
Min. 4.5 0 4.5 0 1.5 200 200 200 S5931 series Typ. Max. 5 10 0.4 10 V1 0.4 V - 3.0 V - 2.5 0 Vb 20 20 2000 Unit V V V V V V V ns ns ns ns ns ns kHz ns ns pF pF pF pF pF pF
S5930 series Typ. Max. 5 10 0.4 10 V1 0.4 V - 3.0 V - 2.5 0 Vb 20 20 2000 -
50 % of saturation *7, *8 5 V bias 5 V bias 2 V bias
trf - 20 0.1 120 (-256S) 160 (-512S) 36 (-256S) 67 (-512S) 20 (-256S) 35 (-512S) 11 (-256S) 20 (-512S)
trf - 20 0.1 150 (-512S) 200 (-1024S) 50 (-512S) 100 (-1024S) 24 (-512S) 45 (-1024S) 16 (-512S) 30 (-1024S)
*5: V is input pulse voltage. *6: trf is the clock pulse rise or fall time. A clock pulse space of rise time/fall time - 20 ns (nanoseconds) or more should be input if the clock pulse rise or fall time is longer than 20 ns. *7: Vb=2.0 V, V=5.0 V *8: Measured with C7883 driver circuit.
Figure 3 Dimensional outlines (unit: mm) S5930-256S, S5931-512S
12.8 4.05 0.4 *2
25.6
S5930-512S, S5931-1024S
4.05 0.4 *2
14.99 0.25
2.5
0.8 *1 5.0 32.0 0.3 50.0
5.0 40.64 0.3 58.84
14.99 0.25
12.0
4.0
2.5 12.0 4.0
0.8 *1
7.65 0.5
0.46 2.54 27.94
0.46
*1: Thickness of sapphire glass *2: Distance from the surface of sapphire glass to the chip surface
7.65 0.5
2.54 27.94
*1: Thickness of sapphire glass *2: Distance from the surface of sapphire glass to the chip surface
KMPDA0089JA
KMPDA0090JA
NMOS linear image sensor
Figure 4 Pin connection
NC NC Vss Vscg Vsub NC THERMISTOR THERMISTOR NC Vscd NC NC 1 2 3 4 5 6 7 8 9 10 11 12 24 23 22 21 20 19 18 17 16 15 14 13 st 1 2 NC NC TE-COOLER + TE-COOLER END OF SCAN NC DUMMY VIDEO ACTIVE VIDEO Vss
S5930/S5931 series
Vss, Vsub and NC should be grounded. Electricity flows between the 20th pin and package metal.
KMPDC0115EA
Terminal 1, 2 st Vss Vscg Vscd Active video
Input or output Input (CMOS logic compatible) Input (CMOS logic compatible) Input Input Output
Dummy video Vsub End of scan NC TE-cooler Thermistor
Output Output (CMOS logic compatible) Input Output
Description Pulses for operating the MOS shift register. The video data rate is equal to the clock pulse frequency since the video output signal is obtained synchronously with the rise of 2 pulse. Pulse for starting the MOS shift register operation. The time interval between start pulses is equal to the signal accumulation time. Connected to the anode of each photodiode. This should be grounded. Used for restricting blooming. This should be grounded. Used for restricting blooming. This should be biased at a voltage equal to the video bias voltage. Video output signal. Connects to photodiode cathodes when the address is on. A positive voltage should be applied to the video line in order to use photodiodes with a reverse voltage. When the amplitude of 1 and 2 is 5 V, a video bias voltage of 2 V is recommended. This has the same structure as the active video, but is not connected to photodiodes, so only spike noise is output. This should be biased at a voltage equal to the active video or left as an open-circuit when not needed. Connected to the silicon substrate. This should be grounded. This should be pulled up at 5 V by using a 10 k resistor. This is a negative going pulse that appears synchronously with the 2 timing right after the last photodiode is addressed. Should be grounded. For sensor chip cooling For temperature control
Figure 5 Spectral response (typical example)
0.5 IR HIGH-SENSITIVITY TYPE S8382/S8383 SERIES (Ta=25 C)
Figure 6 Output charge vs. exposure
102 (Typ. Vb=2 V, V =5 V, light source: 2856 K)
PHOTO SENSITIVITY (A/W)
0.4
10
1
OUTPUT CHARGE (pC)
SATURATION CHARGE S5930 SERIES
0.3
100 S5931 SERIES 10
-1
0.2
SATURATION EXPOSURE 10-2
0.1 S5930/S5931 SERIES 0 200
400
600
800
1000
1200
10-3 -5 10
10
-4
10
-3
10
-2
10
-1
10
0
WAVELENGTH (nm)
KMPDB0163EA
EXPOSURE (lx * s)
KMPDB0164EA
NMOS linear image sensor
s TE-cooler type 1 (T-06E 144P-RNO)characteristics
(built-in S5930-512S, S5931-1024S) Parameter Condition Built-in resistance Ta=25 C Maximum current Tc -Th=20 C Maximum voltage Tc -Th=80 C Maximum heat absorption Tc -Th=20 C
S5930/S5931 series
Unit A V W
Value 1.25 3.6 6.2 7.5
Figure 7 Voltage vs. temperature (Tc=0 C)
5 3.2 A 2.8 A
Figure 8 Heat absorption vs. temperature (Tc=0 C)
10
HEAT ABSORPTION (W)
4
8 2.8 A 6 2.0 A 1.6 A 4 1.2 A 2.4 A
3.2 A
VOLTAGE (V)
3
2.4 A
2.0 A 2 1.6 A 1.2 A 1 0.8 A 0.4 A 0 80 60 40 20 0
2 0.8 A 0 80 60 40 20
0.4 A 0
TEMPERATURE (Th - Tc) (C)
KMPDB0165EA
TEMPERATURE (Th - Tc) (C)
KMPDB0166EA
Figure 9 Voltage vs. temperature (Tc=20 C)
5 3.2 A 2.8 A
Figure 10 Heat absorption vs. temperature (Tc=20 C)
10
3.2 A 2.4 A
HEAT ABSORPTION (W)
4
8 2.4 A 6 1.6 A 4 1.2 A 2.0 A
2.8 A
VOLTAGE (V)
3
2.0 A
2
1.6 A
1.2 A
1
0.8 A 0.4 A
2 0.8 A 0.4 A 0 0 80 60 40 20 0
0 80
60
40
20
TEMPERATURE (Th - Tc) (C)
KMPDB0167EA
TEMPERATURE (Th - Tc) (C)
KMPDB0168EA
s Thermister characteristics
Characteristics Parameter Resistance B-constant Operating temperature Condition Ta=25 C Value 10 3450 -40 to +100 Unit k k C
Resistance vs. temperature Temperature (C) -20 -10 0 10 20 25 30 40
Resistance (k) 78.4 46.7 28.1 18.2 12.2 10.0 8.3 5.7
NMOS linear image sensor
s TE-cooler type 2 (T-06E 108P-RNO)characteristics
(built-in S5930-256S, S5931-512S) Parameter Condition Built-in resistance Ta=25 C Maximum current Tc -Th=20 C Maximum voltage Tc -Th=80 C Maximum heat absorption Tc -Th=20 C
S5930/S5931 series
Unit A V W
Value 0.983 3.6 4.7 5.7
Figure 11 Voltage vs. temperature (Tc=0 C)
5
Figure 12 Heat absorption vs. temperature (Tc=0 C)
10
3.2 A 2.4 A 2.0 A
HEAT ABSORPTION (W)
4
2.8 A
8 3.2 A 6 2.4 A 2.0 A 4 1.2 A 1.6 A 2.8 A
VOLTAGE (V)
3
2 1.6 A 1 1.2 A 0.8 A 0.4 A 0 80 60 40 20 0
2
0.8 A 0 80 60 40 20
0.4 A 0
TEMPERATURE (Th - Tc) (C)
KMPDB0169EA
TEMPERATURE (Th - Tc) (C)
KMPDB0170EA
Figure 13 Voltage vs. temperature (Tc=20 C)
5 3.2 A 2.8 A 2.0 A 4 2.4 A
Figure 14 Heat absorption vs. temperature (Tc=20 C)
10
HEAT ABSORPTION (W)
8 3.2 A 6 2.0 A 1.6 A 4 1.2 A 2.8 A 2.4 A
VOLTAGE (V)
3
2 1.6 A 1 0.8 A 0.4 A 0 80 60 40 20 0 1.2 A
2 0.8 A 0.4 A 0 80 60 40 20 0
TEMPERATURE (Th - Tc) (C)
KMPDB0171EA
TEMPERATURE (Th - Tc) (C)
KMPDB0172EA
Information furnished by HAMAMATSU is believed to be reliable. However, no responsibility is assumed for possible inaccuracies or omissions. Specifications are subject to change without notice. No patent rights are granted to any of the circuits described herein. (c)2005 Hamamatsu Photonics K.K.
HAMAMATSU PHOTONICS K.K., Solid State Division 1126-1 Ichino-cho, Higashi-ku, Hamamatsu City, 435-8558 Japan, Telephone: (81) 53-434-3311, Fax: (81) 53-434-5184, www.hamamatsu.com
U.S.A.: Hamamatsu Corporation: 360 Foothill Road, P.O.Box 6910, Bridgewater, N.J. 08807-0910, U.S.A., Telephone: (1) 908-231-0960, Fax: (1) 908-231-1218 Germany: Hamamatsu Photonics Deutschland GmbH: Arzbergerstr. 10, D-82211 Herrsching am Ammersee, Germany, Telephone: (49) 08152-3750, Fax: (49) 08152-2658 France: Hamamatsu Photonics France S.A.R.L.: 19, Rue du Saule Trapu, Parc du Moulin de Massy, 91882 Massy Cedex, France, Telephone: 33-(1) 69 53 71 00, Fax: 33-(1) 69 53 71 10 United Kingdom: Hamamatsu Photonics UK Limited: 2 Howard Court, 10 Tewin Road, Welwyn Garden City, Hertfordshire AL7 1BW, United Kingdom, Telephone: (44) 1707-294888, Fax: (44) 1707-325777 North Europe: Hamamatsu Photonics Norden AB: Smidesvagen 12, SE-171 41 Solna, Sweden, Telephone: (46) 8-509-031-00, Fax: (46) 8-509-031-01 Italy: Hamamatsu Photonics Italia S.R.L.: Strada della Moia, 1/E, 20020 Arese, (Milano), Italy, Telephone: (39) 02-935-81-733, Fax: (39) 02-935-81-741
Cat. No. KMPD1018E03 Oct. 2005 DN


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